MEMS sensor wafer drying heater
Cutting Carbon in MEMS Drying with IR When you’re making MEMS sensors, getting the moisture off those wafers is a delicate dance. You need the...
Energy efficient wafer heater
Making Sure Your Wafer Heaters Don’t Blow Up We spend a lot of time obsessing over thermal tolerances when we build our wafer heaters. But...
Safety distance for wafer heating
Mind the Gap: How a Few Millimeters Save Your Carbon Footprint If we’re being honest about hitting carbon neutrality in a semiconductor fab, we have...
Reflector for wafer curing lamp
Stop Wasting Power on Your Wafer Curing When you’re curing wafers, every wasted watt is basically just throwing money away—and it adds an...
Temperature sensor for wafer tool
Stop Guessing Your Wafer Temps If you’re trying to build a “Smart Fab,” you’ve probably realized that reacting to problems...
Precision IR sensor for wafer
Keeping Things Safe When You’re Heating Flammable Chemicals Let’s be honest: heating wafers in chemical baths is nerve-wracking. When...
Uniform heating wafer dryer
On the fab floor, a 0.1°C swing during soft bake or hard bake is enough to drift CD, leave scum, and take yield with it. Conventional dryers fight...
Photovoltaic silicon wafer heater
On the fab floor, a lithography line that runs 24/7 doesn’t give you any slack on thermal drift. Push the soft bake just 2°C off target, and the...
Uniform heat for 300mm wafer IR
On a 300mm line, soft bake and hard bake aren’t just thermal steps—they’re yield gates. If your IR heat isn’t uniform, you’ll see linewidth...