Uniform heating wafer dryer
On the fab floor, a 0.1°C swing during soft bake or hard bake is enough to drift CD, leave scum, and take yield with it. Conventional dryers fight...
Uniform heat for 300mm wafer IR
On a 300mm line, soft bake and hard bake aren’t just thermal steps—they’re yield gates. If your IR heat isn’t uniform, you’ll see linewidth...